TY  - CONF
AU  - R Hedden
AU  - V. Lee
AU  - Barry Bauer
AU  - Christopher Soles
AU  - Wen-Li Wu
AU  - Eric Lin
C2  - Characterization and Metrology for ULSI Technology, Conference | | Characterization and Metrology for ULSI Technology: 2003 International Conference on Characterization and Metrology for ULSI Technology | AIP, Austin, TX
DA  - 2003-09-01
LA  - en
M1  - 683
PB  - Characterization and Metrology for ULSI Technology, Conference | | Characterization and Metrology for ULSI Technology: 2003 International Conference on Characterization and Metrology for ULSI Technology | AIP, Austin, TX
PY  - 2003
TI  - Measurement of Pore Size and Matrix Characteristics in Low-Κ Dielectrics by Neutron Contrast Variation
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852162
ER  -