TY  - JOUR
AU  - Eric Lin
AU  - Sushil Satija
AU  - Wen-Li Wu
AU  - Christopher Soles
AU  - D Goldfarb
AU  - B Trinque
AU  - S Burns
AU  - Ronald Jones
AU  - Joseph~undefined~undefined~undefined~undefined~undefined Lenhart
AU  - M Angelopoulos
AU  - C Willson
C2  - Science
DA  - 2002-07-01
LA  - en
M1  - 297
PB  - Science
PY  - 2002
TI  - Direct Measurement of the Reaction Front in Chemically Amplified Photoresists
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852012
ER  -