TY  - JOUR
AU  - Hae-Jeong Lee
AU  - Hyun
AU  - Christopher Soles
AU  - Ronald Jones
AU  - Eric Lin
AU  - Wen-Li Wu
AU  - Daniel Hines
C2  - Journal of Vacuum Science and Technology
DA  - 2005-12-01
LA  - en
M1  - 23(6)
PB  - Journal of Vacuum Science and Technology
PY  - 2005
TI  - Effect of Initial Resist Thickness on Residual Layer Thickness of Nanoimprinted Structures
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852524
ER  -