TY  - JOUR
AU  - T Hu
AU  - Ronald Jones
AU  - Wen-Li Wu
AU  - Eric Lin
AU  - Q Lin
AU  - D Keane
AU  - Steven Weigand
AU  - J Quintana
C2  - Journal of Applied Physics
DA  - 2004-08-01
LA  - en
M1  - 96
PB  - Journal of Applied Physics
PY  - 2004
TI  - Small Angle X-Ray Scattering Metrology for Sidewall Angle and Cross Section of Nanometer Scale Line Gratings
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852323
ER  -