TY  - CONF
AU  - Ronald Jones
AU  - Christopher Soles
AU  - Eric Lin
AU  - Walter Hu
AU  - R Reano
AU  - Stella Pang
AU  - Steven Weigand
AU  - D Keane
AU  - John Quintana
C2  - Proceedings of the Spie 2005: Microlithography, San Jose, CA.
DA  - 2005-01-01
LA  - en
PB  - Proceedings of the Spie 2005: Microlithography, San Jose, CA.
PY  - 2005
TI  - Pattern Fidelity in Nanoimprinted Films Using Cd-Saxs
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853997
ER  -