TY  - ICOMM
AU  - Robert Vest
C1  - http://www.euv2011.ptb.de/euv2011/euv-home.html
C2  - 262nd PTB Seminar: EUV Metrology
DA  - 2011-11-27
LA  - en
PB  - 262nd PTB Seminar: EUV Metrology
PY  - 2011
TI  - EUV metrology at NIST SURF III for lithography, astronomy, solar physics, and particle detection applications
ER  -