TY  - JOUR
AU  - Vivek Prabhu
AU  - S Sambasivan
AU  - Daniel Fischer
AU  - Linda Sundberg
AU  - Robert Allen
C2  - Applied Surface Science
DA  - 2006-11-15
LA  - en
M1  - 253
PB  - Applied Surface Science
PY  - 2006
TI  - Quantitative depth profiling of photoacid generators in photoresist materials by near-edge x-ray absorption fine structure spectroscopy
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854199
ER  -