TY  - CONF
AU  - Christopher Soles
AU  - Ronald Jones
AU  - Joseph~undefined~undefined~undefined~undefined~undefined Lenhart
AU  - Vivek Prabhu
AU  - Wen-Li Wu
AU  - Eric Lin
AU  - D Goldfarb
AU  - M Angelopoulos
C2  - Advanced Environmental and Chemical Sensing Technology, Coference | 20th | | SPIE
DA  - 2003-02-01
LA  - en
M1  - 5039
PB  - Advanced Environmental and Chemical Sensing Technology, Coference | 20th | | SPIE
PY  - 2003
TI  - Polymer Dynamics and Diffusive Properties in Ultra-Thin Photoresist Films
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852201
ER  -