TY  - CONF
AU  - Chad Snyder
AU  - F Mopsik
C2  - Characterization and Metrology for ULSI Technology: 1998 International Conference
DA  - 1998-03-01
LA  - en
M1  - 449
PB  - Characterization and Metrology for ULSI Technology: 1998 International Conference
PY  - 1998
TI  - High Sensitivity Technique for Measurement of Thin Film Out-of-Plane Expansion
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851423
ER  -