TY  - JOUR
AU  - Christopher Soles
AU  - Jack Douglas
AU  - Eric Lin
AU  - Joseph~undefined~undefined~undefined~undefined~undefined Lenhart
AU  - Ronald Jones
AU  - Wen-Li Wu
AU  - D Goldfarb
AU  - M Angelopoulos
C2  - Journal of Applied Physics
DA  - 2003-02-01
LA  - en
M1  - 93
PB  - Journal of Applied Physics
PY  - 2003
TI  - Incoherent Neutron Scattering and the Dynamics of Thin Film Photoresist Polymers
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852097
ER  -