TY - GEN AU - Frank Gayle C2 - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD DA - 2003-03-01 LA - en PB - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD PY - 2003 TI - Micro- and Optoelectronics Materials Science and Engineering Laboratory Annual Report FY 2002 ER -