TY  - CONF
AU  - Lin, Eric
AU  - Wu, Wen-Li
AU  - Jin, C
AU  - Wetzel, J
C2  - Materials, Technology and Reliability for Advance Interconnects and Low-k Dielectrics | | | Materials Research Society
DA  - 2001-04-01
LA  - en
M1  - 612
PB  - Materials, Technology and Reliability for Advance Interconnects and Low-k Dielectrics | | | Materials Research Society
PY  - 2001
TI  - Structure and Property Characterization of Porous Low-k Dialectric Constant Thin Films Using X-ray Reflectivity and Small Angle Neutron Scattering
ER  -