TY  - GEN
AU  - Richard Gates
AU  - Stephen Hsu
C2  - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2003-09-01
LA  - en
M1  - 108
PB  - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2003
TI  - Measurement/Calibration Technique for Nanometer Scale Average Film Thickness on Atomically Rough Surfaces Developed
ER  -