TY  - CONF
AU  - T Hu
AU  - Ronald Jones
AU  - Eric Lin
AU  - Wen-Li Wu
C2  - Sigma Xi Postdoctoral Poster Presentations, 2004
DA  - 2004-02-01
LA  - en
PB  - Sigma Xi Postdoctoral Poster Presentations, 2004
PY  - 2004
TI  - Line-Edge Roughness and Side-Wall Angle Measurements of Nanoscale Patterns by Small Angle X-Ray Scattering
ER  -