TY  - CONF
AU  - Hae-Jeong Lee
AU  - Christopher Soles
AU  - Da-Wei Liu
AU  - Barry Bauer
AU  - Eric Lin
AU  - Wen-Li Wu
C2  - International Interconnect Technology Conference | 6th |
DA  - 2003-06-01
LA  - en
PB  - International Interconnect Technology Conference | 6th |
PY  - 2003
TI  - Structural Characterization of Methylsilsequioxane-Based Porous Low-k Thin Films Using X-Ray Porosimetry
ER  -