TY  - CONF
AU  - Hae-Jeong Lee
AU  - B Vogt
AU  - Christopher Soles
AU  - Da-Wei Liu
AU  - Barry Bauer
AU  - Wen-Li Wu
AU  - Eric Lin
AU  - Gwi-Gwon Kang
AU  - Min-Jin Ko
C2  - IEEE International Interconnect Technology Conference|7th| International Interconnect Technology|IEEE
DA  - 2004-06-01
LA  - en
PB  - IEEE International Interconnect Technology Conference|7th| International Interconnect Technology|IEEE
PY  - 2004
TI  - X-Ray and Neutron Porosimetry as Powerful Methodologies for Determining Structural Characteristics of Porous Low-k Thin Films
ER  -