TY  - JOUR
AU  - Yeon-Gil Jung
AU  - Brian Lawn
AU  - M Martyniuk
AU  - H Huang
AU  - X Hu
C2  - Journal of Materials Research
DA  - 2004-10-01
LA  - en
M1  - 19
PB  - Journal of Materials Research
PY  - 2004
TI  - Evaluation of Elastic Modulus and Hardness of Thin Films By Nanoindentation
ER  -