TY  - JOUR
AU  - Igor Levin
AU  - Richard Leapman
AU  - M Kovler
AU  - Y Roizin
C2  - Applied Physics Letters
DA  - 2003-08-01
LA  - en
M1  - 83
PB  - Applied Physics Letters
PY  - 2003
TI  - Radiation-Induced Nitrogen Segregation During Electron Energy Loss Spectroscopy of Silicon Oxide-Nitride-Oxide Stacks
ER  -