TY  - JOUR
AU  - Yeon-Gil Jung
AU  - Antonia Pajares
AU  - Brian Lawn
C2  - Journal of Materials Research
DA  - 2004-12-01
LA  - en
M1  - 19
PB  - Journal of Materials Research
PY  - 2004
TI  - Effect of Oxide and Nitride Films on Strength of Silicon: A Study Using Controlled Small-Scale Flaws
ER  -