TY  - CONF
AU  - Gery Stafford
AU  - Thomas Moffat
AU  - V Jovic
AU  - David Kelley
AU  - John Bonevich
AU  - Daniel Josell
AU  - Mark Vaudin
AU  - N Armstrong
AU  - W Huber
AU  - A Stanishevsky
C2  - Proceedings of the 2000 International Conference on Characterization and Metrology for ULSI Technology
DA  - 2001-01-01
LA  - en
M1  - 550
PB  - Proceedings of the 2000 International Conference on Characterization and Metrology for ULSI Technology
PY  - 2001
TI  - Cu Electrodeposition for On-Chip Interconnections
ER  -