TY - JOUR AU - Kristine Bertness AU - C Wang AU - Marc Salit AU - Gregory Turk AU - Therese Butler AU - Albert Paul AU - Lawrence Robins C2 - Journal of Vacuum Science and Technology B DA - 2006-09-01 LA - en M1 - 24 PB - Journal of Vacuum Science and Technology B PY - 2006 TI - High-accuracy epitaxial A1GaAs composition determination with inductivity coupled plasma optical emission spectroscopy ER -