TY - JOUR AU - Martin Sandberg AU - Jeffrey Kline AU - Martin Weides AU - David Wisbey AU - David Pappas C2 - Applied Physics Letters DA - 2012-06-25 DO - https://doi.org/10.1063/1.4729623 LA - en M1 - 100 PB - Applied Physics Letters PY - 2012 TI - Etch induced microwave losses in titanium nitride superconducting resonators ER -