TY  - JOUR
AU  - Chukwudi Okoro
AU  - Lyle Levine
AU  - Ruqing Xu
AU  - Klaus
AU  - Yaw Obeng
C2  - Journal of Applied Physics
DA  - 2014-06-30
DO  - https://doi.org/10.1063/1.4885461
LA  - en
M1  - 115
PB  - Journal of Applied Physics
PY  - 2014
TI  - Synchrotron-Based Measurement of the Impact of Thermal Cycling on the Evolution of Stresses in Cu Through-Silicon Via
ER  -