TY  - CONF
AU  - B am
AU  - Michael Cresswell
AU  - Richard Allen
AU  - T Headley
AU  - William Guthrie
AU  - Loren Linholm
AU  - H Bogardus
AU  - Christine Murabito
C2  - Proceedings of the IEEE International Conference on Microelectronic Test Structures, Cork, UK
DA  - 2002-04-01
LA  - en
M1  - 15
PB  - Proceedings of the IEEE International Conference on Microelectronic Test Structures, Cork, UK
PY  - 2002
TI  - Measurement of the Linewidth of Electrical Test-Structure Reference Features by Automated Phase-Contrast Image Analysis
ER  -