TY - JOUR AU - Kevin Coakley AU - Huaiyu Chen-Mayer AU - George Lamaze AU - David Simons AU - P Thompson C2 - Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials and Atoms DA - 2002-06-01 LA - en M1 - 192 PB - Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials and Atoms PY - 2002 TI - Calibration of a Stopping Power Model for Silicon Based on Analysis of Neutron Depth Profiling and Secondary Ion Mass Spectrometry Measurements ER -