TY  - JOUR
AU  - Shuhui Kang
AU  - Vivek Prabhu
AU  - B Vogt
AU  - Eric Lin
AU  - Wen-Li Wu
AU  - Karen Turnquest
C2  - Abstracts SPIE
DA  - 2006-07-25
LA  - en
PB  - Abstracts SPIE
PY  - 2006
TI  - Deprotection Kinetics in 193 nm Photoresist Thin Films: Influence of Copolymer Content
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852550
ER  -