TY  - JOUR
AU  - Karl Jousten
AU  - A Filippelli
AU  - C Tilford
AU  - Fiona Redgrave
C2  - Journal of Vacuum Science and Technology A
DA  - 1997-12-01
LA  - en
M1  - 15
PB  - Journal of Vacuum Science and Technology A
PY  - 1997
TI  - Comparison of the Standards for High and Ultrahigh Vacuum at Three National Standards Laboratories
ER  -