TY - CONF AU - Cedric Powell AU - J Rumble AU - R J AU - D Blakeslee AU - M Dal-favero AU - Aleksander Jablonski AU - Sven Tougaard C2 - 1998 International Conference in Characterization and Metrology, PA DA - 1998-12-01 LA - en PB - 1998 International Conference in Characterization and Metrology, PA PY - 1998 TI - The NIST Surface Analysis Data Center ER -