TY  - CONF
AU  - Cedric Powell
AU  - J Rumble
AU  - R J
AU  - D Blakeslee
AU  - M Dal-favero
AU  - Aleksander Jablonski
AU  - Sven Tougaard
C2  - 1998 International Conference in Characterization and Metrology, PA
DA  - 1998-12-01
LA  - en
PB  - 1998 International Conference in Characterization and Metrology, PA
PY  - 1998
TI  - The NIST Surface Analysis Data Center
ER  -