TY - JOUR AU - John Burnett AU - Zachary Levine AU - Eric Shirley AU - J Bruning C2 - Journal of Microlithography Microfabrication and Microsystems DA - 2002-01-01 LA - en M1 - 1 PB - Journal of Microlithography Microfabrication and Microsystems PY - 2002 TI - Symmetry of Intrinsic Birefringence of CaF2 and Its Implications for CaF2 UV Optics ER -