TY - JOUR AU - Kevin Dwyer AU - Joshua Pomeroy AU - David Simons AU - June Lau AU - Kristen Steffens C2 - Journal of Physics D-Applied Physics DA - 2014-08-05 DO - https://doi.org/10.1088/0022-3727/47/34/345105 LA - en M1 - 47 PB - Journal of Physics D-Applied Physics PY - 2014 TI - Enriching 28Si beyond 99.9998 % for semiconductor quantum computing ER -