TY - SER AU - John Bridges AU - Jonathan Hardis AU - C Cromer AU - J Roberts C2 - AIP, New York, NY DA - 1996-01-01 LA - en PB - AIP, New York, NY PY - 1996 TI - Spectroradiometers for Deep-Ultraviolet Lithography, ed. by W.M. Bullis, D.G. Seiler, and A.C. Diebold ER -