TY - JOUR AU - R Watts AU - Charles Tarrio AU - Thomas Lucatorto AU - R Madden AU - R Deslattes AU - Estler Caticha AU - C Evans AU - T Mcwaid AU - Jing Fu AU - T Vorburger C2 - Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials and Atoms DA - 1993-01-01 LA - en M1 - 79 PB - Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials and Atoms PY - 1993 TI - XUV Optics Characterization at NIST ER -