TY - JOUR AU - Burnett, John AU - Gupta, R AU - Griesmann, U AU - Jou, T C2 - Optical Microlithography XII Proc SPIE 3679 DA - 1999-01-01 LA - en M1 - 3679 PB - Optical Microlithography XII Proc SPIE 3679 PY - 1999 TI - Index of Refraction and its Temperature Dependence of Calcium Fluoride Near 157 nm, ed. by Luc Van den Hove ER -