TY  - JOUR
AU  - Stan, Gheorghe
C2  - Measurement Science & Technology
DA  - 2026-08-19 04:08:00
LA  - en
PB  - Measurement Science & Technology
PY  - 2026
TI  - Calibration method for the height and linearity of an AFM z-piezo transducer in the sub-nanometer to nanometer range using stepped surfaces
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=961549
ER  -