TY  - CONF
AU  - Barnes, Bryan
AU  - Balakrishnan, Purnima
AU  - Burnett, John
AU  - Chew, Aaron
AU  - Dudley, Colton
AU  - Germer, Thomas
AU  - Grantham, Steven
AU  - Moffitt, Stephanie
AU  - Shirley, Eric
AU  - Sohn, Martin
AU  - Sunday, Daniel
C2  - Frontiers of Characterization and Metrology for Nanomaterials 2026, Monterey, CA, US
DA  - 2026-03-17 04:03:00
LA  - en
PB  - Frontiers of Characterization and Metrology for Nanomaterials 2026, Monterey, CA, US
PY  - 2026
TI  - Harnessing the extreme ultraviolet for critical dimension metrology
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=961343
ER  -