TY  - ICOMM
AU  - Barnes, Bryan
C1  - https://www.pathlms.com/avstechnicallibrary/events/12222/event_sections/19435/slide_presentations/558210
C2  - FCMN presentation archives
DA  - 2026-06-09 04:06:00
LA  - en
PB  - FCMN presentation archives
PY  - 2026
TI  - Harnessing the extreme ultraviolet for critical dimension metrology
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=962164
ER  -