TY  - JOUR
AU  - Shih, Albert
AU  - Gao, Wei
AU  - Vogl, Gregory
AU  - Djurdjanovic, Dragan
AU  - Fukushima, Takafumi
AU  - Malshe, Ajay
C2  - CIRP Annals-Manufacturing Technology
DA  - 2026-06-30 04:06:00
DO  - https://doi.org/10.1016/j.cirp.2026.04.115
LA  - en
M1  - 75
PB  - CIRP Annals-Manufacturing Technology
PY  - 2026
TI  - Innovations in advanced processes and systems for semiconductor manufacturing
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=961532
ER  -