TY  - CONF
AU  - Seong-Eun Park
AU  - Nhan Nguyen
AU  - Joseph Kopanski
AU  - John Suehle
AU  - Eric Vogel
C2  - Ultra Shallow Junction 2005, Daytona Beach, FL
DA  - 2006-02-01
LA  - en
M1  - 24
PB  - Ultra Shallow Junction 2005, Daytona Beach, FL
PY  - 2006
TI  - Comparison of scanning capacitance microscopy and scanning Kelvin probe microscopy in determining two-dimensional doping profiles of Si homostructures
ER  -