TY  - JOUR
AU  - Diulus, John
AU  - Head, Ashley
AU  - Boscoboinik, J. Anibal
AU  - Kolmakov, Andrei
C2  - Journal of Vacuum Science & Technology A
DA  - 2026-05-15 04:05:00
DO  - https://doi.org/10.1116/6.0004569
LA  - en
M1  - 43
PB  - Journal of Vacuum Science & Technology A
PY  - 2026
TI  - Operando XPS in reactive plasmas: The importance of the wall reactions
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=959473
ER  -