TY - JOUR AU - Alghamdi, Abdulrahman AU - Ou, Feiyang AU - Kalanyan, Berc AU - Maslar, James AU - Christofides, Panagiotis C2 - Digital Chemical Engineering DA - 2026-03-23 00:03:00 LA - en PB - Digital Chemical Engineering PY - 2026 TI - A CFD-Based Digital Twin Framework for Transient MoCl5 Transport in an Experimental Atomic Layer Deposition Process ER -