TY  - GEN
AU  - Herbert Bennett
AU  - Alain Diebold
AU  - C. Garner
C2  - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2007-01-01
LA  - en
M1  - 112
PB  - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2007
TI  - Will Future Measurement Needs for the Semiconductor Industry Be Met?
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32296
ER  -