TY  - CONF
AU  - Sohn, Martin
AU  - Barnes, Bryan
AU  - Zhou, Hui
AU  - Silver, Richard
C2  - Nanoengineering: Fabrication, Properties, Optics, and Devices XII, San Diego, CA, US
DA  - 2015-09-09 00:09:00
DO  - https://doi.org/10.1117/12.2188224
LA  - en
M1  - 9556
PB  - Nanoengineering: Fabrication, Properties, Optics, and Devices XII, San Diego, CA, US
PY  - 2015
TI  - Quantitative tool characterization of a 193 nm scatterfield microscope
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=919267
ER  -