TY  - JOUR
AU  - McClelland, Jabez
AU  - Anderson, W
AU  - Bradley, C
AU  - Walkiewicz, M
AU  - Deslattes, R
AU  - Jurdik, E
AU  - Celotta, Robert
C2  - Journal of Research of the National Institute of Standards and Technology
DA  - 2003-03-01 00:03:00
LA  - en
M1  - 108
PB  - Journal of Research of the National Institute of Standards and Technology
PY  - 2003
TI  - Accuracy of Nanoscale Pitch Standards Fabricated by Laser-Focused Atomic Deposition
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=620548
ER  -