TY  - JOUR
AU  - Dixson, Ronald G.
AU  - Orji, Ndubuisi
AU  - Goldband, Ryan
C2  - Journal of Micro/Nanolithography, MEMS, and MOEMS
DA  - 2016-01-25 00:01:00
LA  - en
M1  - 15
PB  - Journal of Micro/Nanolithography, MEMS, and MOEMS
PY  - 2016
TI  - Lateral Tip Control Effects in CD-AFM Metrology: The Large Tip Limit
ER  -