TY  - CONF
AU  - Sohn, Martin
AU  - Quintanilha, Richard
AU  - Barnes, Bryan
AU  - Silver, Richard
C2  - Proceedings SPIE Optics & Photonics, San Diego, CA, US
DA  - 2009-08-24 00:08:00
LA  - en
M1  - 7405
PB  - Proceedings SPIE Optics & Photonics, San Diego, CA, US
PY  - 2009
TI  - 193 nm Angle-Resolved Scatterfield Microscope for Semiconductor Metrology
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=903754
ER  -