TY  - CONF
AU  - Qin, Jing
AU  - Zhou, Hui
AU  - Barnes, Bryan
AU  - Goasmat, Francois
AU  - Dixson, Ronald G.
AU  - Silver, Richard
C2  - Instrumentation, Metrology, and Standards for Nanomanufacturing IV, Proceedings of SPIE Volume: 7767, San Diego, CA, US
DA  - 2012-10-11 00:10:00
DO  - https://doi.org/10.1117/12.946120
LA  - en
M1  - 8466
PB  - Instrumentation, Metrology, and Standards for Nanomanufacturing IV, Proceedings of SPIE Volume: 7767, San Diego, CA, US
PY  - 2012
TI  - Multiple-order Imaging for Optical Critical Dimension Metrology using Microscope Characterization
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=912169
ER  -