TY - JOUR AU - KILIC, MUHAMMED NUR TALHA AU - Wines, Daniel AU - Choudhary, Kamal AU - Gupta, Vishu AU - Li, Youjia AU - Chakrabarty, Sayak AU - Liao, Wei-keng AU - Choudhary, Alok AU - Agrawal, Ankit C2 - Digital Discovery DA - 2026-01-16 05:01:00 DO - https://doi.org/10.1039/D5DD00544B LA - en PB - Digital Discovery PY - 2026 TI - Evaluating Large Language Models for Inverse Semiconductor Design UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=960315 ER -