TY  - JOUR
AU  - Josell, Daniel
AU  - Shi, Zhitian
AU  - Jefimovs, Konstantins
AU  - Comamala, Joan Vial
AU  - Pereira, Alexandre
AU  - Stampanoni, Marco
AU  - Romano, Lucia
C2  - Materials Science in Semiconductor Processing
DA  - 2025-09-08 04:09:00
DO  - https://doi.org/10.1016/j.mssp.2025.110041
LA  - en
M1  - 201
PB  - Materials Science in Semiconductor Processing
PY  - 2025
TI  - Deep-reactive-ion-etching in X-ray grating fabrication: a review
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=960121
ER  -