TY  - JOUR
AU  - Bajcsy, Peter
AU  - Sathe, Pushkar
AU  - Vladar, Andras
C2  - Journal of Micro/Nanopatterning, Materials, and Metrology
DA  - 2025-10-25 04:10:00
DO  - https://doi.org/10.1117/1.JMM.24.4.044201
LA  - en
M1  - 24
PB  - Journal of Micro/Nanopatterning, Materials, and Metrology
PY  - 2025
TI  - Relating Human and AI-based Detection Limits in SEM Dimensional Metrology
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=960148
ER  -