TY  - CONF
AU  - Ulf Griesmann
AU  - Quandou Wang
AU  - Marc Tricard
AU  - Paul Dumas
AU  - Christopher Hill
C2  - Characterization and Metrology for Nanoelectronics: 2007 International conference on Frontiers of Characterization and Metrology, Washington, DC
DA  - 2007-01-02
LA  - en
M1  - 931
PB  - Characterization and Metrology for Nanoelectronics: 2007 International conference on Frontiers of Characterization and Metrology, Washington, DC
PY  - 2007
TI  - Manufacture and Metrology of 300 mm Silicon Wafers with Ultra-Low Thickness Variations
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=823030
ER  -